Nanometer-Scale Patterning of Oxygen Molecules Adsorbed on TiO 2 Surface by an Atomic Force Microscope with a Conductive Cantilever

Oxygen molecules are selectively adsorbed on an area of TiO 2 surface on which the cantilever has been scanned at −5.0 V in O 2 atmosphere. The spatial resolution of 22 nm is estimated from the width of a pattern constructed from adsorbed oxygen molecules. The letters “YT” consisting of adsorbed oxygen molecules are written on the TiO 2 surface in an area of 1000 × 1000 nm. The letter “Y” is erased after scanning at 10 V under ultraviolet irradiation.