Highly Efficient Silicon Nanoarray Solar Cells by a Single‐Step Plasma‐Based Process

This is the authors' abstract. We don't add key points for this paper.

Highly efficient solar cells (conversion efficiency 11.9%, fill factor 70%) based on the vertically aligned single-crystalline nanostructures are fabricated without any pre-fabricated p-n junctions in a very simple, single-step process of Si nanoarray formation by etching p-type Si(100) wafers in low-temperature environment-friendly plasmas of argon and hydrogen mixtures.