Preparation of Ba(Ti, Zr)O3Thick Films by Screen Printing

BaTi 1- x Zr x O 3 ( x =0–0.1) thick films were prepared by a screen-printing method on Pt bottom electrodes using ceramic substrates in the firing temperature range from 1250°C to 1450°C. The dielectric, ferroelectric and electric-field-induced strain properties of the thick films were examined in comparison with those of bulk ceramics. The optimum firing temperature to obtain maximum remanent polarization was 1400°C for the thick films. The phase transition temperatures were controlled by varying composition x for the thick films as well as the bulk ceramics. The maximum remanent polarization of 14.4 µC/cm 2 for the thick film was obtained at x =0.025 in the orthorhombic phase.