A new polymeric precursor, perhydropolysiloxazane (PSNO), for silicon oxynitride (SiON) ceramic was synthesized by a simple one‐pot procedure involving partial hydrolysis of H2SiCl2 and the following ammonolysis reaction of the hydrolyzed intermediates with NH3. The structure of new polymer was characterized with perhydropolysiloxane (PHSO) and perhydropolysilazane (PHSN) as reference substances. The conversion of PSNO to ceramic was investigated by TGA, FT‐IR, and solid 29Si‐NMR analyses. A Si‐rich Si2N2O ceramic was produced upon pyrolysis of PSNO at 1400°C under N2 atmosphere.
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Zhang et al. (2011) studied this question.
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