A distributed phase shifter of coplanar waveguide (CPW) using ferroelectric (Ba0.25Sr0.75TiO3) film varactors with parallel-plate electrodes is presented. In order to satisfy the requirement of small dimension of the parallel-plate varactor for the design of phase shifter and impedance match of the circuit, two parallel-plate varactors of 8×10 μm2 are connected in series. The fabricated CPW phase shifter exhibited low insertion loss of 2.3 dB and large differential phase shift of 170° at 7 GHz with a dc bias voltage of 25 V.
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Sheng et al. (2009) studied this question.
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