High-frequency permeability and thermal stability of electrodeposited high-B/sub s/ CoNiFe thin films

The thermal stability and high-frequency permeability of high-B/sub s/ CoNiFe thin films were investigated. CoNiFe films exhibited excellent soft magnetic properties and good thermal stability up to 350/spl deg/C. Annealing in longitudinal magnetic field enabled one to achieve H/sub k/ as high as 35 Oe, while the H/sub k/ value after annealing in a transverse magnetic field was less than 20 Oe. By suppressing the core loss, the effective permeability of high-B/sub s/ CoNiFe thin film at high frequencies was improved successfully.