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September 1, 1999Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Mechanical response of thin films with helical microstructures

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Authors

MSM. SetoKRKevin RobbieLinköping UniversityDVD. VickNational Institute for Nanotechnology

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Seto et al. (1999) studied this question.

synapsesocial.com/papers/6aa4f062c19a1092ac81237fhttps://doi.org/10.1116/1.590887
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