We refined crystal structures of newly found members of the Fe-1111 superconductor family, CaFe₁₋ₓCoₓAsF and SrFe₁₋ₓCoₓAsF (x = 0, 0.06, 0.12) by powder synchrotron X-ray diffraction analysis. The tetragonal to orthorhombic phase transitions were observed at ~120 K for unsubstituted CaFeAsF and at ~180 K for unsubstituted SrFeAsF, the transition temperatures agreeing with kinks observed in temperature-dependent resistivity curves. Although the transition temperature decreases, the structural phase transitions were observed below 100 K in both samples of x = 0.06, and finally they were suppressed in the doping level of x = 0.12. The refined structures reveal that distortions of the FeAs4 tetrahedron from the regular tetrahedron likely originate from mismatches in atomic radii among the constituent elements. In this system, the enlarged FeAs4 tetrahedron resulting from larger radius of Sr than that of Ca is flattened along a-b plane, whereas the smaller radius of Ca makes the tetrahedron closer to regular one, and their characteristic shapes are further enhanced by Co substitution. These results suggest that the CaFeAsF compound is a promising candidate for higher-Tc superconductor.
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