Fabrication, characterization, and fluorine-plasma exposure behavior of dense yttrium oxyfluoride ceramics

Yttrium oxyfluoride (YOF) ceramics are expected to be one of the attractive plasma-resistant materials for semiconductor production equipment. In this study, dense YOF ceramics were fabricated by hot pressing using YOF powder, and their physical, mechanical, and thermal properties were characterized. Moreover, behavior against fluorine-plasma exposure was investigated. The results suggest that the YOF ceramics showed excellent mechanical and thermal properties, and superior resistance for fluorine-plasma exposure to Y 2 O 3 ceramics.