On-wafer magnetically tunable millimeter wave notch filter using M-phase Ba hexagonal ferrite/Pt thin films on Si

A prototype of a fully integrated on-wafer, magnetically tunable band-stop filter operating at millimeter wave frequencies is demonstrated on a Si substrate. In contrast to earlier studies, the filter uses a very thin barium hexagonal ferrite film incorporated into the dielectric layer of a microstrip transmission line to filter the signal. The zero-field operational frequency is about 34 GHz, increasing linearly with the strength of a static, perpendicularly applied magnetic field at a rate of about 2.7 GHz/kOe. Experimentally, high signal attenuation (33–67 dB/cm) at the resonance frequency and insertion losses as low as 4.5 dB were simultaneously observed, while the 3 dB device bandwidths were generally below 1 GHz. Our calculations are in quantitative agreement with the experimental results. We also find an important result that the thickness and conductivity of the Pt ground plane plays a key role in insertion losses, indicating directions for further improvements.