Recent work indicating the determination of the electron temperature versus pressure × plasma dimension ( pL ) characteristic for electronegative gases with a single negative ion is combined with other recent work describing plasmas with more than one negative ion species. Using CF 4 as the exemplar gas, the characteristic is obtained for the range 1 mTorr cm to 10 Torr cm and comparison is made between the case when both F - and CF 3 - are taken into account and that where the generation of CF 3 - is suppressed. Comparison is also made with experimental measurements on the positive column in CF 4 .
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R N Franklin (2002) studied this question.
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