Mode analysis of a LiTaO3 (LTO) plate has been carried out numerically, and an interference-free shear horizontal acoustic plate mode (SH-APM) suitable for measuring the liquid viscosity was found. A viscosity sensor having a liquid container on the side opposite to interdigital transducers (IDTs) was fabricated on X-cut 148° Y-prop LTO. Satisfactory agreement was obtained between the calculated frequency spectrum and the experimental one. A loading test was carried out for a series of Newtonian liquids, which showed good agreement with the perturbation theory.
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Sato et al. (1993) studied this question.
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