Highly oriented fluorocarbon films are deposited downstream from an inductively coupled rf plasma using hexafluoropropylene oxide (HFPO). Angle-dependent XPS results [takeoff angles of 0° (upper) and 80° (lower)] demonstrate that the films comprise CF2 chains terminated by CF3 groups at the outer surface of the film. NEXAFS data establishes that the CF2 groups are aligned in chains which are oriented normal to the substrate.
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Butoi et al. (1999) studied this question.
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