Sol-Gel and CVD Co3O4 Thin Films Characterized by XPS

The present investigation is focused on x-ray photoelectron spectroscopy (XPS) and x-ray excited Auger electron spectroscopy (XE-AES) analysis of the main core levels (O 1s, Co 2p, and Co LVV) of nanocrystalline Co3O4 coatings. The samples were obtained by CVD and sol-gel routes. Co(dpm)2 (Hdpm = 2,2-6,6-tetramethyl-3,5-heptanedione) was chosen as CVD precursor thanks to its appreciable volatility, the absence of direct Co–C bonds and the presence of thermally labile Co–O moieties. The preparation of the sol-gel films was accomplished starting from methanolic solutions of Co(OCOCH3)2⋅4H2O due to the clean conversion of cobalt acetate into cobalt oxides. The obtained Co3O4 films were bluish-brown, homogenous, crack-free, and adhered well to the substrates. The microstructural analyses revealed the formation of single-phase nanostructured layers with average crystallite dimensions ranging between 15 and 26 nm.