Lead zirconate (PbZrO 3 ) thin films were grown on platinum-coated silicon substrates by a chemical solution deposition. The precursor solution for spin-coating was prepared from lead acetate trihydrate and zirconium oxynitrate dihydrate as starting materials and 2-methoxyethanol as solvent; the pervoskite PbZrO 3 thin films have been obtained. Atomic force microscopy (AFM) reveals that the surface morphology smooth, and the average gain size is about 180 nm. The PbZrO 3 thin films annealed at 650 °C showed a hysteresis loop at an applied electric field of 600 kV/cm with remanent polarization ( P r ) and coercive electric field ( E c ) electric values were 7.4 μC/cm 2 and 210 kV/cm, respectively. At 100 kHz, the dielectric constant and dissipation factor of PbZrO 3 film are 300 and 0.020, respectively. The refractive index n and the extinction coefficient k of the PbZrO 3 thin films were obtained by spectroscopic ellipsometry (SE) as a function of the wavelength in rang from 345 to 1700 nm. At 633 nm, the refractive index n and extinction coefficient k ware 2.236 and 0.0474, respectively.
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Tang et al. (2002) studied this question.