A simple technique for height calibration for z piezo with Angstrom resolution of scanning probe microscopes

We present a simple method of preparing a “calibration standard” of nanometer order for the height calibration of z piezo scanner used in scanning probe microscopes. The calibration standard can be accurately characterized using the grazing incidence x-ray reflectivity technique. This method enables one to calibrate displacement/voltage (Å/V) of the z piezo scanner with Angstrom resolution.