Ion energy distribution functions were measured using an electrostatic analyzer in an Ar radio frequency plasma excited with a helical antenna in a magnetic field, where a plasma density jump occurred. The functions showed a two peak and a single peak profile before and after the density jump had occurred, respectively. The electron temperature and the plasma potential decreased after the density jump. The formation of CN films was also studied by sputtering a cylindrical graphite target in an Ar + N2mixture.
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Ohtsu et al. (1997) studied this question.
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