Quantitative x-ray diffraction (XRD) and high resolution electron microscopy (HREM) have been applied to the analysis of an epitaxial CoO/NiO superlattice. This example shows that the qualitative information determined directly from a XRD spectrum or HREM image is limited and can even be misleading. However, by a combination of quantitative intensity measurements and structural modeling, a detailed quantitative characterization of the superlattice structure is possible.
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Fullerton et al. (1993) studied this question.