The electrostatic properties of double-cantilevered micro-electromechanical silicon actuators are examined for possible use in large-scale, deformable mirror arrays. Devices display typical nonlinear deflection versus voltage characteristics and electromechanical instability at elevated voltages. When the polysilicon membrane is suspended over a substrate with an insulating layer, the effects of electrostatic charge migration and contact charging alter actuator performance.
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Horenstein et al. (1997) studied this question.
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