Using x-ray photoelectron spectroscopy (XPS), it is demonstrated that noncrystalline thin oxide layers grown on InP by ultraviolet (UV)/ozone oxidation are composed of a single phase of phosphate average composition InP0.5O2.75 which do not exist as crystalline compounds. The ability of nonstoichiometric InP native oxides to passivate InP surfaces is discussed on the basis of these new findings.
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Hollinger et al. (1991) studied this question.
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