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A novel approach for the determination of the incidence angle in a magnetic-sector SIMS instrument is described. It is based on accurate mapping of the primary beam in the extraction field near the sample surface. The accuracy of the method and the applicability of simple formulas are discussed in detail. In addition, the variation in the incidence angle over the rastered area has been measured and it is shown that, by adjusting the potential on the extraction electrode, this angle can be selected. Grazingly incident primary beams with energies well below 1 keV have been produced.
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Jiang et al. (1997) studied this question.
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