An analysis of a recent three‐exponential approximation of the depth distribution function (DDF) for quantitative Auger/XPS analysis is presented and a comparison is made with an exact DDF obtained for an analytical solution to the Boltzmann transport equation in the transport approximation. Several problems with the approximate DDF are identified and, using the derived analytical form, an alternative two‐exponential DDF is suggested.
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Dwyer et al. (1992) studied this question.
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