We report on the design and experimental measurements of an integrated driving and sensing technique in parametrically excited silicon microcantilevers. The design involves actuation with axial Lorentz forces and sensing with magnetomotive forces, both of which are enabled by a chip-scale permanent magnet. In this demonstration the micromechanical parametric resonance is measured electrically. This system has applications to resonant parametric sensing.
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Requa et al. (2006) studied this question.
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