The driving engine of the free electron laser in Hamburg (FLASH) is an L-band superconducting accelerator. It is designed to operate in burst mode with an 800-ms pulse duration at a repetition rate of 10 Hz. The maximum accelerated beam current during the macropulse is 9 mA. Our analysis shows that the FLASH technology has great potential since it is possible to construct a FLASH-like free electron laser operating at the wavelength of 13.5 and 6.8 nm with an average power of up to 2.6 kW. Such a source meets the physical requirements for the light source for next-generation lithography.
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Schneidmiller et al. (2012) studied this question.
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