Microfluidic pumping through miniaturized channels driven by ultra-high frequency surface acoustic waves

Surface acoustic waves (SAWs) are an effective means to pump fluids through microchannel arrays within fully portable systems. The SAW-driven acoustic counterflow pumping process relies on a cascade phenomenon consisting of SAW transmission through the microchannel, SAW-driven fluid atomization, and subsequent coalescence. Here, we investigate miniaturization of device design, and study both SAW transmission through microchannels and the onset of SAW-driven atomization up to the ultra-high-frequency regime. Within the frequency range from 47.8 MHz to 754 MHz, we show that the acoustic power required to initiate SAW atomization remains constant, while transmission through microchannels is most effective when the channel widths w ≳ 10 λ, where λ is the SAW wavelength. By exploiting the enhanced SAW transmission through narrower channels at ultra-high frequencies, we discuss the relevant frequency-dependent length scales and demonstrate the scaling down of internal flow patterns and discuss their impact on device miniaturization strategies.