A microelectromechanical system (MEMS)-based optical accelerometer combined with a microfiber knot resonator (MKR) is proposed and demonstrated. The 386-μm-diameter MKR, fabricated by a 1.1-μm-diameter microfiber, has a high quality factor (Q-factor) of 8500 and acts as the sensing device for vibration measurement of the MEMS structure. The experimental results show that such an accelerometer has a sensitivity of 654.7 mV/g, and a dynamic range of 20 g. This sensitivity can be further improved by increasing theQ-factor of the MKR, which can be achieved by optimizing the optical and geometrical parameters of the microfiber.
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Wu et al. (2009) studied this question.
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