Substrate Integrated Evanescent-Mode Cavity Filter With a 3.5 to 1 Tuning Ratio

In this letter, the design and RF packaging of substrate integrated widely tunable filter is presented. The filter consists of two heavily loaded evanescent-mode cavities embedded into the substrate. The filter is actuated using two piezoelectric discs, which move thin, flexible membranes that form the top of the cavities. To demonstrate the wide tuning a filter is fabricated and measured to cover a very wide frequency range from 0.98 to 3.48 GHz (tuning ratio-3.55:1). The measured insertion loss is less than 3.57 dB for a 1.1% fractional bandwidth filter.