A Tm3+ doped nanoparticulate silicon thin film and subsequent surface waveguides fully fabricated by using femtosecond (fs) pulsed laser are reported. The thin film exhibits strong room temperature fluorescence peaked at 2.04 μm when using an 808 nm diode laser. The fs-pulsed laser deposited film was then processed using fs-laser micromachining for the formation of channel waveguides, which were subsequently coupled with a 1550 nm laser and characterized for their infrared mode propagation.
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Murray et al. (2012) studied this question.
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