Highly Sensitive Positive Electron Resists Consisting of Halogenated Alkyl α‐Chloroacrylate Series Polymer Materials

Halogenated alkyl α‐chloroacrylate series polymer materials, designed based on the molecular orbital theory, have been investigated as positive electron resists. Both high sensitivity and good thermal stability are accomplished at the same time for these positive resists. Detailed studies of an EBR‐9 positive electron resist are also presented.