Vapor deposition and polymerization of dichloro‐diparaxylylene produces a parylene polymer film whose uniqueness as a superior conformal coating can be attributed to a combination of excellent properties and high throwing power. Additional advantages for low outgassing environments have been suggested for films whose composition and structure are critically controlled. Variations in vaporization temperature, pyrolysis temperature, material charge, deposition load, and charge/load ratio were made and the resultant films analyzed. Mechanical, spectroscopic, thermal, and chromatographic analysis of these films have elucidated the dependence of their oligomeric content and structure on deposition conditions.
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Baker et al. (1977) studied this question.