Rutherford backscattering spectrometry (RBS) using 2–5 MeV 4He-ions is particularly suited for the determination of composition vs depth within the first ∼ 1 μm of compounds such as Y1Ba2Cu3O7. The necessary stopping cross sections for elemental yttrium, barium and copper were determined for the appropriate energy range (0.6–5.14 MeV).
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Børgsen et al. (1989) studied this question.
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