Energy distribution spectra of backscattered electrons in the range 5–25 keV are obtained experimentally. An inverse problem of the reconstruction of the true electron spectrum is solved taking into account the instrument response function of the spectrometer; on the basis of the obtained solution, we specify functions of the real energy distribution of the electrons backscattered from homogeneous and layered samples.
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Bolotina et al. (2009) studied this question.
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