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October 1, 2021APL MaterialsOpen Access

Metalorganic chemical vapor deposition of α-Ga2O3 and α-(AlxGa1−x)2O3 thin films on m-plane sapphire substrates

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Authors

ABA F M Anhar Uddin BhuiyanZFZixuan FengHHHsien‐Lien Huang

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Cite This Study

Bhuiyan et al. (2021) studied this question.

synapsesocial.com/papers/6aa900f05ea9f476fd6c0043https://doi.org/10.1063/5.0065087
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