MoCl 5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene

We investigated doping material selection for multilayer graphene (MLG) interconnects and a passivation process to stabilize the doped state. Intercalation doping with Br 2 , FeCl 3 , and MoCl 5 was compared in terms of doping ability and robustness against environmental effects, which are exacerbated by miniaturization. We found that MoCl 5 was advantageous for miniaturization. We hypothesized that environmental stability would be enhanced by partially oxidizing MoCl 5 and avoiding hydrolysis by water vapor in air. To test this, we examined a passivation process by dry oxygen exposure. We verified that the doping effect was improved and that intercalated material (MoCl 5 ) was partially oxidized and confined in the MLG.