Grafted Conducting Polymer Films for Nano‐patterning onto Various Organic and Inorganic Substrates by Oxidative Chemical Vapor Deposition

Conductive polymer chains were directly grafted on a variety of organic substrates containing aromatic functionalities. In this one-step mechanism, the covalent linkages between the substrates and the conducting polymers are created. The enhanced adhesion by grafting enables high-resolution patterning (down to 60 nm) of grafted PEDOT films using standard lithographic techniques without any modification of the patterning processes.