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December 10, 2003Japanese Journal of Applied Physics

Comparative Studies on Oxygen Diffusion Coefficients for Amorphous and γ-Al2O3Films using18O Isotope

Toshihide Nabatame Tetsuji Yasuda Masayasu Nishizawa Minoru Ikeda Tsuyoshi Horikawa Akira Toriumi

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Abstract

Comparative Studies on Oxygen Diffusion Coefficients for Amorphous and γ-Al2O3 Films using 18O Isotope, Nabatame, Toshihide, Yasuda, Tetsuji, Nishizawa, Masayasu, Ikeda, Minoru, Horikawa, Tsuyoshi, Toriumi, Akira

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Cite This Study

Nabatame et al. (2003) studied this question.

synapsesocial.com/papers/6aa9173e058d56bf8843f063 https://doi.org/10.1143/jjap.42.7205

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