Wavelength tunable ultraviolet laser emission via intra-cavity frequency doubling of an AlGaInP vertical external-cavity surface-emitting laser down to 328 nm

We demonstrate an optically pumped vertical external-cavity surface-emitting laser in a compact v-shaped cavity configuration for frequency doubling to the ultraviolet (UV) spectral range at ∼330 nm. The fundamental red laser emission is realized with a metal-organic vapor-phase epitaxy grown (GaxIn1−x)0.5P0.5/[(AlxGa1−x)yIn1−y]0.5P0.5 multi-quantum-well structure. Second harmonic generation is accomplished by using a beta barium borate non-linear crystal to generate maximum UV output powers exceeding 100 mW. By using a birefringent filter, we are able to tune the fundamental laser resonance to realize a maximum tuning range of 7.5 nm of the second harmonic.