Excellent soft magnetic properties realized in FeCoN thin films

FeCoN soft magnetic thin films are prepared by using the reactive direct-current magnetron sputtering technique. It is found that the addition of N 2 can reduce the coercivity of the FeCoN film, and excellent soft magnetic properties can be obtained when the ratio of N 2 flow to total gas flow is 10%. The influences of texture, grain size, and stress on the magnetic properties and the high-frequency behaviors of the films are also discussed.