Phase formation and stability in the Pd/GaP system

Phase formation in the Pd/GaP system is examined by transmission electron microscopy, Auger depth profiling, and x-ray diffraction of Pd films on (100) GaP, and by x-ray diffraction of bulk phase equilibria samples. The reaction of Pd films with GaP is initiated with the formation of an oriented hexagonal ternary phase, Pd2(GaxP1−x). Another hexagonal ternary phase, Pd12( GaxP1−x)7, forms in the intermediate stages of the reaction, and PdGa and PdP2 are found to be in thermodynamic equilibrium with GaP. The Pd/GaP system is very similar to Pd/GaAs.