Controller design for high-speed, ultra-precision positioning of a linear motion stage on a vibrating machine base stage control on a vibrating base

This paper presents a high-speed, ultra-precision point-to-point position control system design. It addresses precision stages with unknown characteristics, affected by machine base vibration and system effectiveness. The design is based on the nominal characteristic trajectory following (NCTF) control method, which can provide ultra-precision position control performance for the precision stages without accurate dynamic models. However, conventional NCTF control systems neither provide sufficient vibration suppression nor exhibit suitable vibration suppression characteristics. The position control performance is deteriorated by the machine base vibration. To overcome this problem, a procedure for incorporating a bandpass filter and derivative compensator in the NCTF control system is proposed and designed. These compensators exhibit high vibration suppression ability when combined, rather than when used individually. Additionally, they can be easily designed without any accurate dynamic model. The effectiveness of the compensator combination was first investigated using a linear model and subsequently experimentally verified. Using the proposed procedure, a control system was designed for the precision stage with friction characteristics on the vibrating machine base. The designed control system suppresses the residual vibration immediately after the target value becomes constant, and the error converges below 50 nm within 80 ms. • Position accuracy deterioration owing to vibration of machine base resolved. • Control system proposed for high-speed ultra-precision precision stage positioning. • Control of relative displacement of the stage with respect to machine base enabled. • Efficiency of the proposed two types of vibration suppression compensators proven. • Excellent performance of the control system demonstrated successfully.