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Bipolar high power impulse magnetron sputtering (HiPIMS) with a yttrium target is investigated with the help of time-resolved diagnostics. The bipolar HiPIMS discharge is operated with a negative pulse with a width of 100μs, which is immediately followed by a positive pulse (pulse voltage up to +60 V) with a duration of ∼310μs. The time-resolved floating potential first rises to a large positive voltage of ∼55V at the beginning of the positive pulse (+60 V) and after 30μs drops to ∼38V. It indicates the ignition of a reversed discharge. Further evidence of such a reversed discharge is confirmed by time-resolved mass spectrometry and time-resolved optical emission spectroscopy.
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Hippler et al. (2020) studied this question.
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