Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Yu-Chih Tseng, Qing Peng, Leonidas E. Ocola, David A. Czaplewski, Jeffrey W. Elam, Seth B. Darling; Etch properties of resists modified by sequential infiltration synthesis. J. Vac. Sci. Technol. B 1 November 2011; 29 (6): 06FG01. https://doi.org/10.1116/1.3640758 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology B Search Advanced Search |Citation Search
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Tseng et al. (2011) studied this question.
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