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January 26, 2015Nano LettersOpen Access

Generation of Ensembles of Individually Resolvable Nitrogen Vacancies Using Nanometer-Scale Apertures in Ultrahigh-Aspect Ratio Planar Implantation Masks

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synapsesocial.com/papers/6aaa084e5e1c2e91a8fbc405 https://doi.org/10.1021/nl504441m

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