Chemical hazards in the semiconductor industry

Chemical hazards in the semiconductor industry are reviewed with regard to occupational health and safety concerns. Exposure potentials are summarized for each step in the development and processing of semiconductor devices. The hazards associated with replacement substitutes for III-V compounds are also presented. Risk assessment of the hazards involved in these processes requires that redundant control technology be employed. Controls in semiconductor research and development are reviewed with emphasis on those processes and equipment most often involved in losses in the semiconductor industry. These include limiting orifices on compressed gas cylinders, a ventilated gas cabinet for storage of compressed gases, dedicated exhaust risers, exhaust flow sensors, multipoint gas monitoring systems, interlocked devices for exhaust and power failure, smoke and fire detection, and fire suppression.>