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A cylindrical electrode electrostatic analyzer has been designed for surface structure measurements which has sufficient sensitivity that shadowing/blocking data can be obtained without significantly damaging the surface structure. A modification to the standard π/√2 design compensates for that part of the spread in the ion energies due to elastic scattering kinematics. The analyzer is small enough to fit inside a standard 25 cm diameter UHV chamber on a turntable, allowing angular distribution measurements over a wide range of scattering angles. An example of a shadowing/blocking angular scan of a clean Si(100) surface is shown.
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Hird et al. (1995) studied this question.
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