Preparation of single-crystal Y3Al5O12 thin film by metalorganic chemical vapor deposition

Single-crystal yttrium aluminum garnet (Y3Al5O12 or YAG) thin films have been grown on (111) Gd3Ga5O12 substrate by metalorganic chemical vapor deposition. X-ray diffraction, selective-area electron diffraction, and transmission electron microscopy were used to confirm the single-crystal nature of [111]-oriented single-crystal Y3Al5O12 thin films. We determined that the epitaxial relationship between the film and the substrate is (111)[11̄0]Y3Al5O12//(111)[11̄0]Gd3Ga5O12.