1 W solid-state 193 nm coherent light by sum-frequency generation

We report a 1.02 W coherent light at 193 nm and a 2.15 W coherent light at 221 nm generated by sum-frequency generation in CLBO crystals. The conversion efficiency from 221 nm to 193 nm was about 47%. To the best of our knowledge, this is the highest average power of 193 nm and 221 nm coherent light generated by SFG, respectively. These two DUV coherent lights could be used in many applications such as laser machining for their high photon energy features as well as the high power. The 193 nm coherent light also meets the requirements of injection-seeding hybrid ArF excimer laser.