A UHV-compatible ΔE−E gas telescope for depth profiling and surface analysis of light elements

We have developed a compact ΔE−E gas telescope that can easily be incorporated into a standard ultrahigh vacuum ion scattering chamber. If energetic, heavy ions are available as a primary beam, the gas telescope can be used to detect light elastic recoils scattered from the surface region of a sample. The detector consists of a gas ionization chamber in front of a surface-barrier detector. The energy loss signal in the gas (ΔE) is taken in coincidence with the energy signal in the surface-barrier detector (E) to identify both the atomic number and the total energy of the elastic recoil. The design parameters of the detector have been chosen to allow detection of elements from H to O with good depth resolution ( < 100 Å) and submonolayer sensitivity. The mass resolution is adequate to easily separate all elements from H to O.