Biocompatible all-solid-state MSC array fabricated by laser optothermoplasmonic reduction

The rapid advancement of flexible and adaptive electronics has created an urgent demand for ultra-compact, high-performance, and biocompatible energy storage devices. However, the development of micro-supercapacitors (MSCs) that simultaneously meet these requirements remains challenging. In this work, a flexible all-solid-state MSC array is fabricated via direct laser patterning of a graphene oxide (GO), MXene (Ti3C2TX), and silk fibroin (SF) composite film. Interestingly, the laser treatment induces a synergistic effect of laser reduction of GO, the in situ formation of TiO2 nanoparticles from MXene and the carbonization of SF, serving as conductive interdigitated electrodes. While the untreated regions that maintain the original hygroscopicity function as a humidity-responsive solid-state electrolyte and separator. In this way, a planar MSC array (∼11 000 MSCs on a 5-in. substrate) with an individual areal capacitance of 11.48 mF/cm2 is achieved at 100% relative humidity, together with excellent mechanical flexibility. This work presents a scalable strategy for realizing high-performance, biocompatible, and patternable miniature energy storage devices suitable for next-generation implantable electronic systems.