The Micro Hemispherical Resonator Gyroscope ( μ HRG) is a novel inertial navigation instrument developed in recent years, featuring advantages such as compact size, high precision, low cost and long operational lifespan. Due to machining process imperfections, harmonic errors inevitably exist in the resonator, leading to frequency splitting that severely impacts gyroscope performance. This paper investigates the influence mechanism of harmonic errors on the frequency splitting of a μ HRG resonator integrated with T-shape masses. First, the impact of frequency splitting on gyroscope accuracy is analyzed. Subsequently, a parametric model of harmonic errors in the resonator is established using finite element analysis (FEA). By varying geometric parameters of the resonator’s main structure under n = 1 and n = 2 operational modes, the interaction laws between geometric parameters and harmonic errors from the 1st-order to 8th-order on frequency splitting are systematically studied. The results reveal a coupling phenomenon among harmonic errors induced by different geometric parameters. Additionally, the impact of temperature on frequency splitting is analyzed, providing theoretical support for reducing frequency splitting and harmonic errors in μ HRG.
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Yao et al. (2025) studied this question.
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